%PDF-1.4 % 10 0 obj <> endobj 27 0 obj <>/Filter/FlateDecode/ID[<1E19F43947EC7835343B69CC7C3948A4><56FAB2093FDFA3408BF18DB2EAB16D92>]/Index[10 33]/Info 9 0 R/Length 87/Prev 30743/Root 11 0 R/Size 43/Type/XRef/W[1 2 1]>>stream hbbd``b`j ~@q3`q@y#`-) .@zX"E @xt&F C)"3 `~ - endstream endobj startxref 0 %%EOF 42 0 obj <>stream hb``g``2cgT,  bP 9$ly?Ȟ\>L.1m`A  endstream endobj 11 0 obj <> endobj 12 0 obj <> endobj 13 0 obj <>stream hެYo8 ,<$QPp:UѤA0ج] )R.'F!P$gHΐ0"8''ƒLW9qq\™GA, %}8UDpD܅Q(]2|HEZ.^kT2r3OET5*."(E^lȠ/( [T-h.u%B?4⭞ow5f8_7xoKNq7D+hJCpMjtIL~c;: 8ƻ:DzδՌt h&~^<,GTd0 F+Y?,LWJ"7EgFwg (:\UT^ӫԈn3.c44YOm Qj&M2EI7sy436MomO*}\B@1._F?jeQƩ3zSWK!?}l֬ o?'slz"zDHQ ZD((.3 jR&qJx&#qoQi9 @P?I87QOl:mBr3&φVт`\dD9b3ȗSbR,Q'bmF7Eo9n[XDXo Q2@f=єsK"Wd{?9%'t8xV*6`Qe͑DXr;1({x Nsh 1G[}mۋY{}]Pmx۱o{O ssDzv}vW4ΓT,}N.¿lÓ~4E zFpMۤK؂N]3\ ٭@o^`Ru7obX?PWK>stream HV]6}ϯ#5^;~̅,.,Z  ĊgΜ9݇R)'q9Z 1=ўY}y9dO c+5I&u OhmaǤ\xK<Ե$ԯ #3 3zpoƟJ/Xf W atd} 83ВdF2#dzJzu=r W@s8Jh$;}ܽ7]:&(yIG3f1kvt͝D,`¶`մ^u5{&,җ4 `) 0:δ"A 1v?|ӼS>stream H͎0{bDxv pb9VE+< 8'CC*Ǖӌ pJ#8>5zP+8}],T7M@sTG:p4ON+7ɚͻgxvw+vg֛O_p|7 X1Wv<,,X omS1*0je\D^V7Zv+w,h\)Qs? |̫|Ȟep Kn.χ`9F)ߐ%)^!NtYLYR<ٜUn.l\H'6#Fvt罪qpKtclW^/ |d _;<`et(ej((WEv,ZBpٮ'<_+G|Gz2q/NgR|K5ZZ/ojnDzmL KcV{IjcVqhf^(!BgQlN TT;צK.3CuDŽrl?v}0Oԥ1ݸ: endstream endobj 16 0 obj <>stream H|V6X<˙3vف2XE,%F3q$AU!Mt4)4x"2e҂E2#CTyR>ب۶' ,e/+&U9iְH/[62)*($AmJZ % @ݦ]d@/{H_%rݔjr `!C Q:S]kj;IԺluo' zsrTo2,Ç32Tp0unnd#`CF?w":{f0X;/#׻@: AvGP z8.>Mrf !;[V44ɂ#rͬUj,h"nC\m3d<ݸeQ,J'YՎ)(n]G"x E5#2޽!Y }`EKfC&qv=$LˊDWte)Fe5rIoFKm ;1')tEhZVH;JbpDR.3Qw"p!YҼmyG9לRU9**KE5a\b\,Ԏ%1"bu<-c Und"iȩ#$verCE GϢaBGQ7!M%ѻsBaTyS?ͬypҀn۞ |zUJul2 CHWtj:?ČF23;Y/qAf+E[a!Mx^_H0йC4ԆnC1]GQig4/>4;򤸡@bE.' F«ƓYw&&hvPo)(6qе.rtbsƲ; |޿H4db!cL0>*6u0LWͺZ?T¹h{·SJ`>stream H̔K0wSd=4E]"q+xfdȢD|@568_2se-T:(_lz)hc/$vչi/Mtܰj_wtC \ۗ\cPm&B4(A!4:rrxÃy'Y ƹ =7Xכۗwo(51,M2lʠf}smaS"b%/NM4B]7 US\dU)t 'O 8*G\gBj YC:'NJeWZ%҂i2qZғA7#n%Gg\Adz=(Tp=M|"gB5ޗZ9 s?RH:!vъV!fq< qHTSʩ9UO36q1X\1}oR_ % BR*Sr;!IBq9.‰cHӳW-*QjSy޻ j-P9UPiJpj=ޠzEZx_6輓9I't 7itS4]KoRNP endstream endobj 18 0 obj <>stream H̕MoA +|A=djHQzaoCD7(V(AB~06RqALƯ~^{]AVh@)+#4Tu+TUA(Q=(]ENR`qu_5sHG×?byؖ^NTK MzTLMW;*BcSપ"p]d!5jtL-&ah( 6Oq%VUaĖ(PIZ.JZڣpn.޻E- w&  dK d I%!KjdIS ok$h?:GÜxlX67kY}جo'iѻaqȊߋz[:aP7'^-ݱ\(gܗ%_`}/ԯR(R #$酪D=qsa 4l~VvEƷW%o* mV2iVГfyR;~ ?5e PA@SP*<PYAd'э;9$K'P;҂Ts/J'ӷcnnlceG g0?`; ` endstream endobj 19 0 obj <>stream HMn0:,Y\:MڴQEȁZAzERAD8!6J`Tci(eQuɘĞpkO ΪQB9P7i6`am3خ El~8@ Ţ$*g w#eP~]TGUHJeRZk|~EήggK4"IJ Tw>B澆_Q_^|_ex LsCq` 4ɔ PQl7;6 E[:D2կB9e=r.=.BukvAMaBFu`] q-G n$<_6{XO5,#+8>mRCoxh0wR¬ B[-Bv#=@J;n8$Y( YA o_)_rҟc>mR,x(sRW@ "^OTȫgw]X-\ys[ endstream endobj 20 0 obj <>stream HM0se+*Jh{XQ9 k8N _{8@%)Q(PNTϋVp  m™DZ?&r!La?$I(ؠ0C*!a |܊@s gK&Hҥdt "L"]> ֐a&r\9q'B6 鮙!!l0lStƶ)d/\DLiP= \.E0²\W_T{TZf4}yx.݊\ݺdx707Sw+3hvW Z0h~NS4l$/fa.lgn6N7b}?E}B\T3 oC4u'w.췝?u QBPP{Dk 7܁dw+& endstream endobj 21 0 obj <>stream H=o0w[HYi nE 8AKR1`3ܷLP )4.mŰ7 BՆ5r}>GeMm*޼L1>/_5FRrRã+g\9Co*,uCJ|y?=2Y2-T? JHsAiT2GB Rj.OP@}"T2PmbP'-ܯbeBes,׼nY^ <ҎGs>i&geu nc_Oԗǡ#fM+^S+SF8N=}}w()D}"Sh| m 8@kҦצ5i@_[ZV'#fUNB:*G*#j/zVn^6ojZR.Rʍ Y+9g׭Q<_(w(`ż endstream endobj 22 0 obj <>stream HyTSwoɞc [5laQIBHADED2mtFOE.c}08׎8GNg9w߽'0 ֠Jb  2y.-;!KZ ^i"L0- @8(r;q7Ly&Qq4j|9 V)gB0iW8#8wթ8_٥ʨQQj@&A)/g>'Kt;\ ӥ$պFZUn(4T%)뫔0C&Zi8bxEB;Pӓ̹A om?W= x-[0}y)7ta>jT7@tܛ`q2ʀ&6ZLĄ?_yxg)˔zçLU*uSkSeO4?׸c. R ߁-25 S>ӣVd`rn~Y&+`;A4 A9=-tl`;~p Gp| [`L`< "A YA+Cb(R,*T2B- ꇆnQt}MA0alSx k&^>0|>_',G!"F$H:R!zFQd?r 9\A&G rQ hE]a4zBgE#H *B=0HIpp0MxJ$D1D, VĭKĻYdE"EI2EBGt4MzNr!YK ?%_&#(0J:EAiQ(()ӔWT6U@P+!~mD eԴ!hӦh/']B/ҏӿ?a0nhF!X8܌kc&5S6lIa2cKMA!E#ƒdV(kel }}Cq9 N')].uJr  wG xR^[oƜchg`>b$*~ :Eb~,m,-ݖ,Y¬*6X[ݱF=3뭷Y~dó ti zf6~`{v.Ng#{}}jc1X6fm;'_9 r:8q:˜O:ϸ8uJqnv=MmR 4 n3ܣkGݯz=[==<=GTB(/S,]6*-W:#7*e^YDY}UjAyT`#D="b{ų+ʯ:!kJ4Gmt}uC%K7YVfFY .=b?SƕƩȺy چ k5%4m7lqlioZlG+Zz͹mzy]?uuw|"űNwW&e֥ﺱ*|j5kyݭǯg^ykEklD_p߶7Dmo꿻1ml{Mś nLl<9O[$h՛BdҞ@iءG&vVǥ8nRĩ7u\ЭD-u`ֲK³8%yhYѹJº;.! zpg_XQKFAǿ=ȼ:ɹ8ʷ6˶5̵5͵6ζ7ϸ9к<Ѿ?DINU\dlvۀ܊ݖޢ)߯6DScs 2F[p(@Xr4Pm8Ww)Km endstream endobj 23 0 obj <>stream HW TSg~YDtơ $%B@Ihc$[Q!QZ+KqB⎎8պT.?Μ3̜9{߽ H? a!XPsA({~ D蘍 #qd`}s9N%#H3͸![&51CBiP~l 3Pv"0E"bndq*v  Л3|A!VaA >Ku r"G?fx0k݂+Pu`H|~\Ϟ&H.pg2ص4T$tjĈ"8B1Q?9WyΦ?Kup3 ^;MOP\lHd06 q¢ځ')©B1U2 | `vX"D#z&B{--6h)i-NXL88d*AG 'ain<+ 2YcW@ $Rt8 PH%?p{ r͇^tbp_?KOx<1;vB]5Hy0 s蔮7j2*|$y^+iny^I,nj-pII÷?y]R=v2G.mѩ[w Lz4KX_;֟ ~T_볩IEӻv2_Ihg1tP254|4dy2ȇ_ڼ߷G{l;7\&U0={grrApwEaҖW4*6[jFtoYKi['K"$Oܺzܙ"@^e1L_qN}]5 x^_LІ_97G(pX b?4 ة\V}&A.%47&)Ku-<$ܰn;%w6>ޔ1c3ޙ'q=ȇ7ڛc.4?w9ŕsx>";?8x,Chz˂O'mK5:76EP>fZUAK QWRc.{#ט 0W!L3a3bz!0csQH; uc`x Ճkˆ)IEEXfqY :&,9`dIj<'p =X(F",&Z#Sp(PfKtdE7Dؚ(܆)02 A$ QHb54Wn8ޛ6OVl q"Gs<}|5B F0`PȷSJo 0 v:,C)IJbcc^sjA"d<[ JNx\ÔZiir,] >}8 K`h Sh%*:bnwX ZSmfBtjڄWj0JU C#W0AJҦ0_aQYUU * F[5J9eEe8EQGt3A\QH"dE]quŸGotޠ~W~wT5'8 @[d]F*>ޞomV,P(B*$;U?KO Qx` _9W'%)@ S*&t.2['sVtTpU*NPsg[.cUP JBǩ/s*pvQcǣQc1:&BdׇUTLdM"8%af%c"SQ3STɑBRA:I(sU ONxQꄸΜnpFO'[>{&ͻcj(J"pk5r0tYBA` c4-)ƾ`ǎ0M=U5=m~o\%w>jBcS]v}~miSONˍ<˓ǿ9 !>ݍ3FOЮ׶#٣s?$Nl𩨾p~ k,gf0(!  Do<$ьG`:tFSRBrdRڊ:pZ ϙ[ֺ+G *dUKEE_{\9?aY?YaG*>^.tԗ~˶ 9ҽܰM?kR ~df1,5rJfMh;T^UqU/FdziFmcNIUFmcN*=>xu~;6kwTWKYg6]65 G<M>jrEtd"4޹׬y!Pn.Ւ+xkNKNa }pj`QˣQd-^,nv7ô og㻆nʤ %L ]+\E|nȫwP(WDžMqNO/Mz_oȬf܌"]>_**)NiJ~Ѷ'5%en0*kA YMmC˶:jsC,7Tn\z_V_OtFߖFKxM7lDQ㾌 %R Qǫav.und!t? #ζ9x}O,>◃nx~s ́:hd !pmp`F2@a#sfbx# c`QL!v ^8C$\N2Xop?0럋_ VpHpw7 !(ZOl~UbԲ;>aJq!H->LL(h}93" N4+1^,Gh=$8#kEK Fbb[ ٰ QA \"i?5Wۧ[]|kQh|Xv,ŵĞ8GIH>YOtF*dQ'U5_LS`$+RO%X Fhշ۟uqpk8~yIu*}{ ^bm"c/M{1XؐѸK8%0kQ&ITi֣MO&qnj\s55BDp\snHEf+!=85_5V6is)+_ό 0g\lpeAQ3kxOmoh EpF&iI8V:S[+@[FI(ʧXNWyzD0)ewr\H;H|ЏM%:.9FC/W*8@o%(dU͖LsqUp% ` =k͊":AW!-6p4Fbmcz+5]8 -.kƬ/rҐ*}+mrN' ܊i~<&,xtڼ^hr.l<}IQ-C{V d'#P'=*[ŚN  '5fb\ kxx6_` \C 8^YD1#JQ? 2HNhF5vb,oP̳Z@=x+ a7;Ǡd}΢ׄAwVaZxr/PАAїr^y8&6_5hY55:9amFsuHwkM^3e*Tl.=oJ:q;[<==}Yh gjÕ%%.e~#eפ̘2{LI.UVY7eYeQdN2WFD+kF'GdhbC=IAQXLZĆ{`;mvY{#i_Iβ/ʼ|Kb!f iI3^Kdžt6ASMM<{HjqD^=7aGT5, x#Mm!-x> 顨$d7j'#=b!YľDf>qEf>#btrYzxt+5T%DM9e[}ȻPgqו#*  Smb|EN}nQآ {t2€,sVg/A'SAFQfFy0QjJ$a@\f)C`8xH;24tY\76/>Mo( Ȟ e`1WAL |'lf5(e11 T%&*THU/ )8%d)$)$$P2L!8?$Rghii $sr23JRSRS<ݽ\<+ss|CsB* RJ a}J+Ad"P<B(ԯd)4I2`LC)\M1PHC3dB](,ԑzҁn( W E e@2h#;vT22$mR7"j)@XA -+?X$$+,Xxkq<ra) {v endstream endobj 24 0 obj <>stream HTP=O0 +<W`@:tC%nDM{|Ζmܑ ٛ#,W6LܻͬD%衮H%7tnAEv4%JH3RMG!^ Pk{KYӄP+kAWe4ߚű}nw>stream Adobed     $$''$$53335;;;;;;;;;;  %% ## ((%%((22022;;;;;;;;;;t"?   3!1AQa"q2B#$Rb34rC%Scs5&DTdE£t6UeuF'Vfv7GWgw5!1AQaq"2B#R3$brCScs4%&5DTdEU6teuFVfv'7GWgw ?4I%)$IJI$R\*0.v+iqipp~c7?X0@# V$GCz-?1ܗo<r?q͟##aR7 K<yO?R\o<r_}Ǚ6~Я)t}=JK K~c7?/??ΏIrLGPΫ ϭ< xy!.K28uǟe!w.I$I$$I)I$JRI$5-ƕ>ygXy~_I%#I$I%)$IJZU__{(2r_7+$^I$JRI$=`0  KC}V>b؟8?Tѧ,'ׯ ɼucDa} W圇 3ϋg#/_ŪD\A`ߊ\Jcnkut܂&EDq썬 m:nR|W[?ꂽ3~9kֳ*4C[cG(^. [Iuw>'sƿ=KMϏSټZvm0lu+63?k+VZioK/KU΍+uꊧr5ء8? %4fc+{ZA.X.||N&p??S# 3[ɐJu9VNoŌN-:ļ^&[]La'\gWA\de}rcDmE-_/YKWwC/ɇtaiTIs/ZI%)$IMkbBoW2?bBoS?Z'_C ?L Yj3ϋg#/_Ū/?rh;3rF\'&Ѻ7I_l >_3idꜿ/7nGkꊳԿ.[7nGkꊳԿ.?\?KX_K/KU΍+uꊦQtbԵ\\YG1gY]/dfXLՕަGgU3O)9 b]L +q:?nF_;\L <㙕OCp+ Ved1˷N#B8$B N¹xN3w$5>I$'AI$JRI$NԅN7Sc,#\?P%ՐvU;p H ,ROޫ@m?sekvg dàt+wٜPqc3p>wr&gF>_u ?ж5WֽA؍?&q4{~o#p3ŎF:z?p.X91Lpl*R+,u%>dR"۫m XIw*nxLckv.L_VwΞr.Ct]BخNK÷o8@cӸ~)!<.6&p??S# 3^^%xlaS`d<ʷW:?V~lu:X9y#iPAѺW-$&bRƃJ۷"'!#c8>I$j$I)I$JRI$I$$I)_oiYCVz5G{/$R1)z_@p⚼z_@p⚳~-?_;I,gyI$JRI$I$$I)I$JRI$I$;1f?OWJZp #j@d7?ze\l~fJNKЃ|ctzW@t\0y *;<&kmr_/spTI*m$I)I$JRI$I$$WI%?T$WI%?T$WI%?T$WI%?T$WI%?T$WI%?T$WI%?T$WI%?T$WI%?T$WI%?T$WI%? endstream endobj 26 0 obj <>stream JFIF``C    $.' ",#(7),01444'9=82<.342C  2!!22222222222222222222222222222222222222222222222222md" }!1AQa"q2#BR$3br %&'()*456789:CDEFGHIJSTUVWXYZcdefghijstuvwxyz w!1AQaq"2B #3Rbr $4%&'()*56789:CDEFGHIJSTUVWXYZcdefghijstuvwxyz ?dHby$eHK31rI=T?-c 5To` vpmXadWOAkOwH'uc}?ۺG!?Ə#?^K|:u@ܢ탺ē{ #]fn/ek<4翡Qꫪi/73?-c 4n?m#{=%K6K}£ Քi`߫7?t XBۺG!?Ƽ_euciJ2`(쑀L\]BIVV ƺ`UW>g.Z>?-c 5%cxז󺌲*Ԁk,A]?! g`cN{6jkEW{OU?oJ*7zo#ώkifHd* 6vE%gLlc'nz`uc^odu{V#a7>z}iTn.p?Lg:(;%<%%'6fB8}e8=~OnOk5KVbu 9 ?TXzt:6w;t"gڤKI^&*(2[f7YKc:=sM0zvqʁ䏕m>YT/!O-G\~Ղ^ў8J*]Ÿׯ+OgՋ ?.zQE|fOU?o {>αՈ&WX)gI Ue|sok ZNg+Zrx>rA@`?dBU 1?xA ֙}}ns.^.($]ǐ-Koo5M3t%,wyq+Tߑ^[ÞqUaYǘ+21|{J>g5%Ԟ Xcdxs+3JsE^ZYef)m A ~Umk^%6'ȶk$jF Wx_l#.rVJI8*l>Xŵ.@OjwQ75D~ORx7:۩.^ mdrD9 ZxVM-^D%^]{KXh ci>^S|-LZp(0̟ȫהWϝE}!ykhgp pkᇇɍ`>`k.jeOۭ:N2B :dG]K΁Ln!YپcfH ~[I6( 4!U#VKGƚ 0ӧbWLls)ONV j\vF^PaZ<'hG2nl%q^{auU #+¨x O]j_ơq}9 PI7"֕jAZСgݕ|A=B5cq^8S[yM*;9ǡiN垍aKVy@^úwq^xeGq!;^Î>ջx[B𝱾ѧA!vg< 5&?S!ϴ?˼H9p}bV SZueԌK莦(,̟ȫהWCwьuFl}k- ßӋS< Z*N<Ǿ$*?>йIV}2cסi '[_U0YvTI7ӡ`}Cmg ZG/g=3պMn겡BpcJzSv?LE8:OWkK+3cLN?7IeTUVo! yᏆ1Hn+qs:po`mǓNt˚7TՇ󱷑nM~) m ;Y[\Sq'jKV.ك#Fu3R -#LQ$7+S[VFs TqwoDx O:eb@G%P>ko\Yjw7Wd#K\Œrq׸E]c7Fӵ-N{Ȍ(#q^JrfߦGw7Q8g2%eB$G@M?1`5Xi3a"yÞjq-KȐo8#O`yO}[7Τ{[mSʜZ-?"uK˽JUK`wpBϽ?9YGu>±67`c}jeXE=f@̹eu H=jt=kQYj&L9R UHn[T*Wi(=}s֟j[va@#'AjJF"g|7>~!kXBi.BqZz_\st3 g98\TڹڳKv+_n`SO1 (kulOyNչ~WMew2Kc6lmTgf0O͓3ӭjxMB݉gҠf$Cd԰ʝD޷a_*ԥ$ױxDѡ5|۔}Ñi64H5n%&܂w?81<~u"yƛЫa'ԤDDI<3ǹtJ)R滼NZTQE᙮wJ4ֲ )d95xšލ&, *7YHƽ:8-W cUxڼ\drXdלgѧKF/^)ו8´γkWVe)'5/i622 .2Az׵QZeE'+-L^WG0_Cg9TYLS;Wn}i|cfēj:d;Gc`pCqϪBTRRIh,k¾3&)gh*/N$?A?>stream h2S0P0W0P+-q b".vv7 endstream endobj 2 0 obj <>stream Acrobat Distiller 7.0 (Windows) PScript5.dll Version 5.2 2014-06-24T17:23:53-04:00 2006-04-04T20:27:12-04:00 2014-06-24T17:23:53-04:00 application/pdf Microsoft Word - DESIGN GUIDE FOR CLEANROOMS.doc Registered User uuid:61e452d3-5274-482b-95b9-7df04553b117 uuid:7780a352-ed56-4a30-a5bd-ce4d27fe1c88 endstream endobj 3 0 obj <>stream h޲P0Pw/+Q0L)64 T$ endstream endobj 4 0 obj <>stream h>/Filter/FlateDecode/ID[<1E19F43947EC7835343B69CC7C3948A4><56FAB2093FDFA3408BF18DB2EAB16D92>]/Info 9 0 R/Length 48/Root 11 0 R/Size 10/Type/XRef/W[1 2 1]>>stream hbb&t%&6 L@W .#`$ w endstream endobj startxref 116 %%EOF